MEMS is a collective term for microelectronic mechanical systems that integrate devices such as microsensors, microprocessors, microactuators, and microautomata that are based on silicon structures. The related science and technology for the development, manufacture and application of MEMS can be collectively referred to as MEMS technology. The appearance and development of devices and systems such as miniature fluxgates and micro-relays provide a good opportunity for the development of electrical equipment. After analysing the possibility of miniaturization and intelligentization of electrical equipment, this article describes the characteristics that microelectronics should have in electrical equipment and draws the characteristics of micro-electrical equipment. 2 The rapid development of MEMS technology makes it possible to realize miniaturization and intelligentization of electrical equipment. The characteristics of MEMS are small size, light weight, and stable performance. It has passed the 1C process, especially LIGA technology (ie deep X-ray etching, electroforming, plastics Mold and other technologies can be mass-produced with low cost and good consistency of performance. The advantages of MEMS are low power consumption, high resonant frequency, short response time, high comprehensive integration, high added value, and the ability to convert, transmit, transmit, transmit, transmit, transmit, etc. energy, heat, sound, magnetic and chemical energy, and biological energy. . After more than ten years of development, MEMS technology is expanding into three-dimensional processing, represented by LIGA technology, and it is being developed from various elemental technologies to system integration, moving from basic exploration to practical application. In 1990, Switzerland's T.Seitz first produced the world's first miniature fluxgate sensor using a microelectronics planar process. The fluxgate integrated a magnetic core and an induction coil on a single chip to form a fluxgate system. An abbreviation of an electromagnetic type micro relay developed jointly by scholars of Switzerland and Belgium reported in IEEE periodicals in 1998, and its on-resistance is lower than 0.4! , Open circuit resistance is greater than 10G! The on-time is about 0.2ms. In the MEMS field, people have studied electromagnetic micro-motors, generators, micropumps, micro-opto-electronic switches, micro-relays, micro-scorpions, fluxgates, magnetoresistive devices, and other micro-operations based on electromagnetic effects. Sensors or sensors are moving toward systematization and arraying. Current electrical systems have large electrical components, high cost, and low automation. The theory and methods for controlling and protecting these electrical appliances are also quite backward. The development of high-tech and environmental protection appliances is a trend in all industries. In the low-voltage electrical part, micro-intelligence will not only change the control management mode of the original system, but also expand the application range of the electrical appliances; in the mid- and high-voltage part, as the voltage level increases, the volume and cost increase rapidly. The factors are particularly prominent, and it is also more difficult to achieve according to the existing technical ideas. With the intensification of informatization technology, information acquisition (sensing) technology and information execution technology, the so-called “external device†technologies, have become the bottleneck of development, both in terms of miniaturization or performance-cost ratio development, and their interface with the host ( Interface) has also become the key to hinder the processing speed. The rapid development of MEMS technology and communication technology provides the technical basis for the miniaturization, intelligence, and inexpensiveness of the electrical components of the power system and the integrated automation management of the system. 3 requirements of electrical equipment on microelectronics features The current size of intelligent electrical components is mainly in the information acquisition part and the system-driven part; the basic reason for the low degree of automation is that the mutual connection is not close enough, communication is not very mature. However, the development of communication technology provides a good basis for in-depth study of this part. Relatively speaking, micro-sensors and micro-actuators are very backward in terms of miniaturization, intelligence, and low price. Therefore, in the electrical equipment, it is necessary to constitute a micro smart sensor system that collects data effectively and reasonably, and a micro intelligent driver system that must establish an optimal driving effect must be established. A fast and reliable communication system must be established between each functional module, thereby forming a distributed system. Big system. 3.1 Micro-sensor system The system should be able to effectively and reasonably collect data and accurately reflect system status information. According to the amount of power system needs to be measured, the microsensor selects a sensitive sensing head corresponding to a physical signal, integrates the microprocessor and the communication component into the same chip, and constitutes an intelligent electrical device, which may be a current sensor, a voltage sensor, a temperature sensor, Pressure sensor and so on. From the current situation, to obtain a certain amount of state in the system, the information obtained by a single sensor is very limited, and sufficient information must be measured by the array sensor. Therefore, the array sensing is the application direction of the micro smart sensor in the power system. For example, the current in the busbar is usually measured by a current transformer, but the current is measured in the microelectronics by magnetic measurement. The semiconductor magnetic sensor head is integrated in the chip, but the accuracy of the magnetic field (measurement current) measured at a single point is difficult to meet the requirements. A plurality of sensors are installed in accordance with a certain topology to collectively complete the measurement current to form an array sensing method. The microprocessor is integrated in the sensor to denoise, filter, linearize, and compensate the data. The integrated communication component carries out data transmission at high speed and in synchronization, and can obtain the current value in real time for display or protection. Microdrive system distributed drive achieves optimal results similar to microsensors. Microactuators also integrate microprocessors and communication components to form micro-intelligent drivers that can operate according to the level and number of instructions to achieve optimal results. However, at present, the microactuator drive force is still very small. In the application of electrical equipment, it is necessary to establish a distributed drive, that is, an array driver, which can be implemented according to the topology optimization theory so as to achieve the best drive effect as few drivers as possible. The rapid communication of the communication system ensures that the functional modules are in close contact with each other. The communication system has two layers: the data exchange communication between the same level devices where the array sensor and the array driver are located and between them and the upper layer device. This is the lower layer network communication; the system control center and the device center machine Inter-communication is higher-level network communication. Although the distance between low-level sensors and actuators and between them and the equipment on the previous layer is relatively close, but the distribution form is flexible, the size of the micro-system itself is small, and it is not convenient for wired connection. Therefore, this layer of data exchange adopts the method of wireless local area network. Each micro-system sets parameters in advance to work together. The system control center and the equipment center machine realize high-speed communication, the networking is flexible and convenient, the expansion is good, and the compatibility is good. It can be seen that both the analysis of reliability and real-time requirements of the power system and the characteristics of the distributed sensor system and distributed driver system all determine the high-speed and reliable requirements of the communication system. 4 MEMS Characteristics Analysis in Electrical Equipment An intelligent system is a system in which an array of devices or devices can sense changes in the state of the system together and make a useful, optimized response through a device or array of devices. Each intelligent sensor system and intelligent driver system can perform data processing according to their own authority, make "decision", and exchange data with other devices. The establishment of micro-intelligent appliances and their systems using microprocessors as the core and micro-sensors, micro-actuators and communication modules as peripheral devices has become one of the directions for the development of electrical equipment in the long term. Therefore, the control and protection mode of the power system is completely different from the traditional mode of control and protection. It has no traditional concept of electrical devices and shows its own characteristics. The system acquires various kinds of information according to needs and can control and protect it according to the essential requirements. The sensors in this system are small in size and use wireless communication, which facilitates flexible installation and optimized layout. Different types of sensors are selected according to the control and protection theory, which is more in line with the original physical nature. For example, the overload protection usually uses a bimetallic strip thermal release, while the microsensor system calculates the heat by measuring the current. Of course, the temperature sensor can also be installed to directly measure the temperature and provide protection. The open system integrates and judges the acquired information and makes optimized control and protection decisions. A distributed sensor system based on a high-speed communication system can be used by multiple upper-layer devices. The control center of the entire system or the central network of the local network can make optimization control and protection decisions based on the data obtained from the lower devices. . MEMS improves the control and protection reliability of electrical equipment. Intelligent micro-driver, according to the order of the "authority" of the sender to perform hierarchically, can also be based on how much the command to act, such as according to the master control device or a command to directly control the device to action; and some devices need to accept certain The number of commands only works, such as self-learning and self-adaptation according to the actual operation of the power system, and flexible adjustments are made. The command receiving method of the driver can improve the reliability of the operation, in particular, the current situation in which the microcomputer protection device malfunctions. 5 Conclusions The application of MEMS in electrical equipment is a complex project involving many disciplines, mostly advanced cutting-edge disciplines, while the power system is both complex and demanding, and it is a more conservative system, which contains a lot of needs Research issues, such as structural topology optimization design of micro-sensor systems and micro-driver systems; research on reliable and efficient communication mechanisms; research on management and calculation methods of distributed systems; research and theory and methods of power system control and protection based on MEMS technology; Device integration technology, anti-jamming technology, etc. It is of far-reaching significance to study the application of microelectronic mechanical systems in electrical equipment. In theory, the control and protection strategies of the power system are more in line with the actual physical nature. The system is flexible, adaptable, and scientifically manageable. Existing control and protection systems are incomparable; economically, production, installation, and commissioning costs are low. , High degree of intelligence, easy installation and commissioning. Therefore, it is feasible to realize new electrical equipment with modern science and technology. Capable of supporting heavy casement windows,Upvc window handles,Window crank handle,Screwfix window handles BOGO HARDWARE & FITTING CO.,LTD , https://www.bogohardware.com