Domestic sensor industry ecological chain gap complemented [full text]

Science and technology development In Shanghai Jiading Industrial Zone, nearly 5,000 square meters of high-grade micro-nano processing ultra-clean plants, the Shanghai Micro-Tech Industrial Research Institute (hereinafter referred to as "ITRI") and the world's leading fab in close cooperation 8 In the "Beyond Moore" R&D pilot line, it is "running" dozens of wafers.

On September 10, the 8-inch “Beyond Moore” R&D pilot line established by the ITRI was formally launched, filling the gap in the field of micro-electromechanical systems in the field of smart sensors that lacked a small batch of intermediate test production lines.

The launch of the 8-inch R&D pilot line not only achieved seamless integration from R&D to mass production, but also enriched and integrated the “Beyond Moore” ecological chain in China, and was a key link for benchmarking international industry competition.

Wang Xi, a vice president of the China Association of Science and Technology and an academician of the Chinese Academy of Sciences, explained that “beyond Moore” means not only obeying Moore's Law, but also making smaller and smaller semiconductor process dimensions, but on a mature process line, developing non-digital, Diversified semiconductor technologies and products. "Beyond Moore" will no longer be confined to advancing integrated circuit process nodes by means of size changes, but will also focus on multi-dimensional innovations such as materials, processes, and structures to realize "change lanes and overtaking" in other emerging technologies such as sensors.

The sensor, located at the base layer of the Internet of Things, is the entrance to data collection and the cornerstone of the Internet of Things. However, the foundries are reluctant to accept, and small batches of pilot tests have nowhere to be done, which has become a common problem for China's sensors and other micro-electromechanical systems R&D institutions. According to the 8-inch R&D pilot production line manager and factory manager You Jiajie, currently, about 60% of sensors in China are imported, and the gap is very large. In particular, the MEMS intelligent sensors are almost entirely dependent on imports.

At present, in the “Beyond Moore” field, the 8-inch line of the Shanghai Microtech Industrial Research Institute, which runs from research and development to full-scale production, is recognized as the leading technology compared to the 6-inch production line commonly used in the industry. According to relevant sources, the entire production line has invested nearly RMB 1 billion. At present, a phase of 3,000 square meters has been put into use.

It is reported that the 8-inch R&D pilot line will focus on the development of "Beyond Moore" sensor product technology, which can fully develop the surface, body, 3D micro-nano processing and the development of new processes, new devices, and new systems, and according to "Beyond Moore". Product and Technical Features MEMS, silicon photonics, RF, silicon-based III-V, 3D integration, MR magnetic sensing, power and biology related processes and metrology equipment were deployed. As the first advanced 8-inch R&D pilot line in China, it can not only undertake services such as product R&D, small-batch production, technical training, and equipment verification, but also help improve the success rate of R&D. It will also help to achieve “Beyond Moore” products and Technology seamlessly connects from R&D to mass production.

You Jiajie introduced that the newly completed R&D pilot line currently stipulates that the production capacity will be about 3,000 wafers per month and 5,000 wafers in the later period. “We can support users from hundreds of pieces to thousands of production capacity requirements. Small-scale orders are first hatched on the pilot line. Once the early market tests are successful, large orders can be transferred to large foundries to begin mass production. ."